JPH0712932Y2 - 半導体加速度センサ - Google Patents

半導体加速度センサ

Info

Publication number
JPH0712932Y2
JPH0712932Y2 JP1990101411U JP10141190U JPH0712932Y2 JP H0712932 Y2 JPH0712932 Y2 JP H0712932Y2 JP 1990101411 U JP1990101411 U JP 1990101411U JP 10141190 U JP10141190 U JP 10141190U JP H0712932 Y2 JPH0712932 Y2 JP H0712932Y2
Authority
JP
Japan
Prior art keywords
acceleration
directions
acceleration sensor
sensor
cantilevers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990101411U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459471U (en]
Inventor
通昭 山県
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP1990101411U priority Critical patent/JPH0712932Y2/ja
Publication of JPH0459471U publication Critical patent/JPH0459471U/ja
Application granted granted Critical
Publication of JPH0712932Y2 publication Critical patent/JPH0712932Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP1990101411U 1990-09-27 1990-09-27 半導体加速度センサ Expired - Lifetime JPH0712932Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990101411U JPH0712932Y2 (ja) 1990-09-27 1990-09-27 半導体加速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990101411U JPH0712932Y2 (ja) 1990-09-27 1990-09-27 半導体加速度センサ

Publications (2)

Publication Number Publication Date
JPH0459471U JPH0459471U (en]) 1992-05-21
JPH0712932Y2 true JPH0712932Y2 (ja) 1995-03-29

Family

ID=31844832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990101411U Expired - Lifetime JPH0712932Y2 (ja) 1990-09-27 1990-09-27 半導体加速度センサ

Country Status (1)

Country Link
JP (1) JPH0712932Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2663710B2 (ja) * 1990-11-16 1997-10-15 富士電機株式会社 半導体式加速度センサ及びその製造方法
JPH07325104A (ja) * 1994-06-01 1995-12-12 Zexel Corp 加速度センサ
JP5536994B2 (ja) * 2008-06-30 2014-07-02 株式会社東芝 慣性センサ及び慣性検出装置
JP5577080B2 (ja) * 2009-12-02 2014-08-20 スタンレー電気株式会社 ヘッドランプの光軸調整装置

Also Published As

Publication number Publication date
JPH0459471U (en]) 1992-05-21

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